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MEMSnet Home: MEMS-Talk: Epoxy
Epoxy
2004-07-07
Yonduck Sung
Epoxy
Yonduck Sung
2004-07-07
Hi, everyone.

I am trying to spin epoxy (Epotek  UVO-114) to cover it on PDMS thin film,
which will be used as a dry resist mask. According to the one of George
Whitesides group's paper, it's going to make it easy to hadle thin PDMS film.

(Rebecca J. Jackman, George M. Whitesides, 'Using Elastomeric Membranes as Dry
Resist and for Dry Lift-Off', Langmuir 1999, 15, 2973).

I am wondering if any of you knows the recipe for spincoating Epotec UVO-114.
Any of your comment will be appreciated. Thank you.


Thanks,
Yonduck Sung

Graduate student
Carnegie Mellon Mechanical Engineering
5000 Forbes Av, HH B120
Pittsburgh, PA 15213

Phone : 412-268-2514
Email : [email protected]


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