Hello
We are currently using a RIE machine with mainly SF6 and CHF3. We are
considering to used gas containing chlore or even brome. Which specific
equipment is required concerning the evacuation and the safety when working
with such gas? Is there some resource available online about this subject?
Thanks for yours answers
Regards
Francois

___________________________________________________________
Dr François Montaigne
Laboratoire de Physique des Matériaux - UMR 7556
Faculté des Sciences - Université Henri Poincaré - Nancy I
Bd des aiguillettes B.P. 239
54506 VANDOEUVRE LES NANCY Cedex
FRANCE
Tel: +33 3.83.68.48.08
Fax: +33 3.83.68.48.01