Hi Sudhanshu,

On your first point, unfortunately there is no one definitive source for
material properties in MEMS, and even if there was I'm sure much of it would
be subject to debate, as so many materials used in MEMS are not
standardized.  I'm afraid you're on your own, but one of the best resources
is the one right here http://www.memsnet.org/material/ .  Other than that,
if there is something in particular that you can't find, you're already
talking to the right group; just ask.

On the second point, Alessandro is exactly right.  The Coventorware "Process
Editor" is  not a process simulator like, say, Suprem.  It is merely a way
to instruct CW's solid model builder how to create your structure in a layer
by layer fashion.  And I can tell you from experience that it is very often
the case that to create the structure you want you will need to make up a
"process" file that has almost nothing at all to do with the actual process
you would use to fabricate the real part.  In fact you often have to trick
CW to get what you want, which you will learn as you gain experience.

Hope this helps- Good luck.

Marc Straub
Solidus Technologies, Inc.
Colorado Springs, CO



-----Original Message-----
From: Ale [mailto:[email protected]]
Sent: Wednesday, July 14, 2004 1:04 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Coventor Doubt

Hi,
it' s not a long time that I use Coventor, but I think that (about the
second question) the Process Editor is only a very simple and very
approximate way to model a process. Its aim is to permit, togheter with the
Layout Editor, to build a solid model with the geometry you desire. So, I
think you can' t set the process temperature. For example, you can't also
set the specific etchant (e.g HCl). You can only set the etch type. This is
what I've learned using the Process Editor.
I hope this will help you.

Alessandro.

----- Original Message -----
From: "Sudhanshu Garg" 
To: "General MEMS discussion" 
Sent: Wednesday, July 14, 2004 10:50 AM
Subject: [mems-talk] Coventor Doubt


>
> Hi,
>
> Two questions regarding Coventor:
>
> 1) I am using Coventor to deposit p-type/n-type silicon. These materials
> don't exist in the MPD. If I google and chase for properties that coventor
> asks for, I rarely get all of them. Simulation with only a few of them
> aboard is not of any use. Any idea where I can get all of them ?
>
> 2) The process editor doesn't allow specification of temperature at
> which a particular process is being carried out. You have to feed that in
> the corresponding material's property entry. This is not at all realistic
> and if I can't get away with this - I will have to switch 'back' to
> Intellisense. Help ??
>
> thanks,
> SGarg
>
> ~*~
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