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MEMSnet Home: MEMS-Talk: Thick SOG Sacrificial layer
Thick SOG Sacrificial layer
2004-07-16
[email protected]
Thick SOG Sacrificial layer
[email protected]
2004-07-16
Hi,

Any one can tell me how to achieve a SOG (spin-on-glass) layer around 10
microns, or any SOG vendor who supplies thick SOG about 5 -10 micron thick?

Thanks
-ware.


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