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MEMSnet Home: MEMS-Talk: Polyimide Curing Tool
Polyimide Curing Tool
2004-07-16
Fritz Kub
2004-07-16
Michael D Martin
2004-07-19
Bill Moffat
2004-07-19
Nels P. Ostrom
Polyimide Curing Tool
Michael D Martin
2004-07-16
Hi Fritz,
  We use a two "tool" process 50 deg C - 200 deg C on a hotplate, then
into a tube furnace purged with nitrogen from 200-350 deg C.

-Mike


>>> [email protected] 7/16/2004 12:59:48 PM >>>
We are in the process of purchasing a tool for for controlled
3-temperature step nitrogen-ambient curing of polyimide films?  Could
someone describe the preferred tool either homemade or commercial?

Fritz Kub
Naval Research Laboratory
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