-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Jack Mulligan
Sent: Thursday, July 22, 2004 10:43 AM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] HIgh vacuum grease removal

Ralph -

Acetone probably will not do a very good job of removing your greases.
We
have a patented technology we have used to clean numerous MEM, Semi and
relate parts. It works with any fluid with a vapor pressure.

I wonder if adding an electrostatic chuck to Ji's etcher would be
cheaper.