If your health and safety regulations permit it, you may want to try using a
Chlorinated Solvent (TCA)?


"Lee, Duhyun"  wrote:
Hi MEMS talkers,

I'm looking for a solvent that cannot dissolve the photoresist AZ1512.
The photoresist-patterned sample will be dipped into the solvent-based reaction
solution.
If there are any available solvents, please recommend me.

Lee, Duhyun

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[email protected]
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
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