Dear MEMS Talkers,

I'm trying to remove the native oxide on Si (111) surface and
to sputter a metal on the bare (111) surface.
To my knowledge, BOE seems to be suitable but I have no experience on it.

Please show me your recipe to get a fresh Si(111) surface for sputtering.

Lee, Duhyun

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Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
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