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MEMSnet Home: MEMS-Talk: what is oxygen plasma etching speed of PMMA?
what is oxygen plasma etching speed of PMMA?
2004-09-10
Z. Jiang
what is oxygen plasma etching speed of PMMA?
Z. Jiang
2004-09-10
hi all,

 I browsed over the web. Everyone says PMMA can be etched by oxygen plasma
very well. but I can't find a chart of etching speed to power and time.
Does anybody know this? Thanks.

 Cheers

 Jiang


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