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MEMSnet Home: MEMS-Talk: Si oxide removal
Si oxide removal
2004-09-10
Lee, Duhyun
2004-09-10
Brent Garber (2 parts)
2004-09-10
Altena, G. (Geert)
2004-09-10
[email protected]
2004-09-10
Phillipe Tabada
2004-09-10
Gary
Si oxide removal
Altena, G. (Geert)
2004-09-10
> From: Lee, Duhyun [mailto:[email protected]]
> Sent: 10 September 2004 02:25
>
> I'm trying to remove the native oxide on Si (111) surface and
> to sputter a metal on the bare (111) surface.
> To my knowledge, BOE seems to be suitable but I have no
> experience on it.

Won't a simple dip for about 30 sec. in 1% HF solution do the trick?

Regards,
\Geert.
--
Geert Altena  -<=>- Integrated Optical MicroSystems
\nabla \times H = J + \frac{\partial D}{\partial t}\\ \nabla \cdot D = \rho\\
\nabla \times E = - \frac{\partial B}{\partial t}  \\ \nabla \cdot B = 0

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