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MEMSnet Home: MEMS-Talk: Diced wafer cleaning options
Diced wafer cleaning options
2004-09-22
Markus Lohi
2004-09-27
NANO-MASTER, Inc.
2004-09-22
Kasman , Elina
2004-09-24
Reuter, Markus
Diced wafer cleaning options
Markus Lohi
2004-09-22
Hi all,

I am looking into different wafer cleaning options for diced silicon wafers.
Could somebody advise me with the most usual methods/equipment and their pros
and cons? We need a cheap process for low volume washing. The wafer is mounted
on an adhesive tape.

Thanks,
Markus

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