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MEMSnet Home: MEMS-Talk: eBeam evaporator problem
eBeam evaporator problem
2004-10-06
Archy Xuan
2004-10-06
Mike Colgan
2004-10-06
Honggang Jiang
2004-10-07
William Lanford-Crick
2004-10-08
rakesh babu
eBeam evaporator problem
Archy Xuan
2004-10-06
Hi, all,   In my lab there is this 20 yr old NRC e-beam evaporator that broke
down lately. We had some urgent project needs be done and this busted me.

The symptom is that the beam won't focus, and is very broad (~3/4" diameter).
In effect, it heats up the edge of the crucible.  We can't melt anything in the
crucible, not even Au.
I have no clue how to fix this thing.  I'm guessing that the focusing mechanism
is busted.

anybody can throw some ideas? It's fairly urgent and thanks!


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