You might also make sure the high voltage is at the level it should be.

Subject: [mems-talk] eBeam evaporator problem


Hi, all,   In my lab there is this 20 yr old NRC e-beam evaporator that
broke down lately. We had some urgent project needs be done and this busted
me.

The symptom is that the beam won't focus, and is very broad (~3/4"
diameter).  In effect, it heats up the edge of the crucible.  We can't melt
anything in the crucible, not even Au.
I have no clue how to fix this thing.  I'm guessing that the focusing
mechanism is busted.

anybody can throw some ideas? It's fairly urgent and thanks!