Brent, you are most likely aware of this, however if not it could be very
dangerous to you.  Berylium can ruin your lungs.  The concentration of
Berylium in the air you breathe must be kept exceedingly low.  If you
already are aware of this then I am sending it in an abundance of caution.
Gary

-----Original Message-----
From:   Brent Garber [SMTP:[email protected]]
Sent:   Wednesday, November 03, 2004 12:26 PM
To:     [email protected]
Subject:        [mems-talk] Implanting Beryllium

Greetings All,

Does anyone have experience implanting Beryllium using a vaporizer?  I
have a Varian DF4 implanter and I'm trying to get a good beam current
using Beryllium Fluoride and Argon gas.  So far my beam current starts
out strong and then steadily decreases to nothing.  Any help is
welcomed.

Thanks!

Brent

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