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MEMSnet Home: MEMS-Talk: high resolution dry photoresist
high resolution dry photoresist
2004-11-16
E. Sendler
2004-11-16
Adrian Brozell
high resolution dry photoresist
E. Sendler
2004-11-16
Hello to all,
I am looking for a high resolution dry photoresist film, with film thickness
between 50-100 microns, and able to produce features (holes) of approximately
15-20 microns diameter.  Does anyone know of any resist which would satisfy
those specs?

Thanks,
Ed

Kresge Eye Institute - Detroit,MI


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