Hello All,
I am using the SU-8 2035 for making film thicknesses of 50 microns.

I am proceeding with the soft and hard bake in a normal way. After my exposure I
can see clearly that around the structure I have considerable swelling of my
polymer, around 100% of my original thickness. SOmetimes the polymer sticks
well, sometimes it delaminates from its region

Also, the structure I expose is somewhat always minored in dimensions in
comparison of my original mask.

Has someone ever encountered this problem?

Is it due to a wrong exposure time (I am using a UV source , 365 nm), 7 to 9
seconds?
Is it due to a bad curing? maybe should be longer to reduce


---------------------------------
Créez gratuitement votre Yahoo! Mail avec 100 Mo de stockage !
Créez votre Yahoo! Mail

Le nouveau Yahoo! Messenger est arrivé ! Découvrez toutes les
nouveautés pour dialoguer instantanément avec vos
amis.Téléchargez GRATUITEMENT ici !