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MEMSnet Home: MEMS-Talk: Etchant etch of Cu but not In
Etchant etch of Cu but not In
2004-12-04
Zhiyan LIU
Etchant etch of Cu but not In
Zhiyan LIU
2004-12-04
Dear friends,

I am trying to do micro etch of Cu (0.5um), I use APS-100, but it dissolves
In also. Does anybody know Cu etchant but let In survive?

Thank you very much

Zhiyan


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