A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: How to sputtering ZnO
How to sputtering ZnO
2004-12-07
ypy0816
How to sputtering ZnO
ypy0816
2004-12-07
Hi,

Does anyone know how to sputtering ZnO?
I sputter ZnO using pure O2, is that right?
I get 400nm~500nm thickness after sputtering one hour.

Sincerely,
Jacob Yeh


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
MEMStaff Inc.
Tanner EDA by Mentor Graphics
University Wafer