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MEMSnet Home: MEMS-Talk: Silicon Etch Stops
Silicon Etch Stops
2004-12-09
Roger Brennan
2004-12-09
Dirk Eicher
Silicon Etch Stops
Roger Brennan
2004-12-09
Recently, I was told n-epi (silicon) could be used as the etch stop.  That
is, the P substrate is etched away and the n-epi is left

This is contrary to my understanding.  I thought P+ silicon was the only
silicon etch stop.

Thanks in advance,

Roger Brennan
1620 Legacy Village Road
Reno, NV 89521-6164
Home: [email protected]
Home: 775-852-4240

Applications Director
Solecon Labs
770 Trademark Drive
Reno, NV 89521-5926
Work: [email protected]
Work: 775-853-5900 ext 108


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