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MEMSnet Home: MEMS-Talk: looking for any materials transparent to excimer laser
looking for any materials transparent to excimer laser
2005-01-02
X.Guo
2005-01-03
David Nemeth
looking for any materials transparent to excimer laser
X.Guo
2005-01-02
Dear all,

Happy the new year!
Does someone know any materials easy to deposit that is transparent to the
excimer laser (such as KrF)?

Thank you very much

Regards,
Xiaojun

reply
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