looking for any materials transparent to excimer laser
David Nemeth
2005-01-03
David
You might look into MgF2, CaF2, and perhaps even SiO, depending on
thickness. Check out www.lesker.com for information on possible deposition
methods. For example, MgF2 is available in sputtering sources.
http://www.lesker.com/newweb/Deposition/Sputter_Targets/ElementNames_J_P/Ma_
magnesiumFluoride.cfm?CFID=581512&CFTOKEN=28963401§ion=magcomps&init=ski
p
David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Cell: (202) 288-1067
Ph: (703) 961-9573 x206
Fax:(703) 961-9576
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of X.Guo
Sent: Saturday, January 01, 2005 10:30 PM
To: mems-talk
Subject: [mems-talk] looking for any materials transparent to excimer
laser
Dear all,
Happy the new year!
Does someone know any materials easy to deposit that is transparent to the
excimer laser (such as KrF)?
Thank you very much
Regards,
Xiaojun
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