A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Bonding of SU-8 to SU-8
Bonding of SU-8 to SU-8
2005-01-12
Thorsten Knoll
2005-01-12
BRIAN DOUGLAS
2005-01-12
Loren St. Clair
2005-01-14
Arroyo MTeresa
Bonding of SU-8 to SU-8
Thorsten Knoll
2005-01-12
Hi all,

we are trying to bond two exposed and developped SU-8 layers. Does anybody
have experience with bonding SU-8 to SU-8 and can give some advice?
Currently, we are using T ~ 100°C and a bonding force of 2 kN under vacuum
atmosphere, but the adhesion is very poor.

I greatly appreciate your comments.

Regards,
Thorsten

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMStaff Inc.
University Wafer
Process Variations in Microsystems Manufacturing