Dear Thorsten,

I hope this novel technique developed by F J Blanco, from our group,
could help:

"Novel three-dimensional embedded SU-8 microchannels fabricated using a
low temperature full wafer adhesive bonding" Journal of Micromechanics
and Microengineering volume 14, issue 7, pages 1047 - 1056.

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        Maria T. Arroyo
        Microsystems area
        IKERLAN