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MEMSnet Home: MEMS-Talk: How to build XeF2 etching machine ?
How to build XeF2 etching machine ?
2005-01-14
Luis Prill Sempere
2005-01-14
Isaac Wing Tak Chan
How to build XeF2 etching machine ?
Luis Prill Sempere
2005-01-14
Hi,

Could you finally build a machine? Could you sent me some useful links or
book names? I am thinking of building one myself. How long did it take you
and how much did you spend to achieve it?

I want to build one, because I can't find any companies, that could do the
etching for me. I tried with KOH, but the result of my undercut was not
round, more pyramidical. I need round shapes. Maybe something else would
work too.

Thank you very much


Luis

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Luis Prill Sempere
University of Texas at Austin Physics Department
C1600, 1 University Station
Austin, TX, 78712

Tel1.: (512) 232-7677
Tel2.: (512) 471-0852
[email protected]
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