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MEMSnet Home: MEMS-Talk: polimide and polycarbonate thin films
polimide and polycarbonate thin films
2005-01-14
Daniel L Baptista
polimide and polycarbonate thin films
Daniel L Baptista
2005-01-14
Hi,

I would to know if someone know the procedure to spin coat thin (100-300
nm) polimide and polycarbonate films under Si substrate. Is there a good
supplier for these two polymer?

Thank you very much for these information,

Daniel Baptista
Eng. Department
Cambridge University
UK



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