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MEMSnet Home: MEMS-Talk: polymers for intermediate wafer bonding
polymers for intermediate wafer bonding
2005-01-15
Brijesh Raut
polymers for intermediate wafer bonding
Brijesh Raut
2005-01-15
hi ,
i wanted to know which polymers/ adhesive can be used for intermediate wafer
bonding.i checked many papers and learn that BCB(Benzocyclobutene) is the best
for adhesive bonding, but i wanted to know about more materials that can be
used.

sincerely
brijesh
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