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MEMSnet Home: MEMS-Talk: wafer bonding
Photoresist pattern on PDMS
2005-01-04
Hongjun-ECE
2005-01-05
Z.,W.Y.(Lydia)
2005-01-19
Miao LIU
2005-01-20
Hongjun-ECE
wafer bonding
2005-01-20
li cai
2005-01-21
Hongjun-ECE
2005-02-03
Miao LIU
wafer bonding
li cai
2005-01-20
My research requires bond wafer 1 to wafer 2, mechanical thin wafer 1 to 100
um, and then debond the wafers.  Does anyone know a good bonding agent?

Thanks,

Li Cai



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