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MEMSnet Home: MEMS-Talk: Unstable Plasma - Dry Etching
Unstable Plasma - Dry Etching
2005-01-20
William Lanford-Crick
2005-01-20
Isaac Wing Tak Chan
2005-01-21
William Lanford-Crick
2005-01-21
Robert Lindegren
2005-01-21
Frank Torregrosa
HfO2 removal
2005-01-25
[email protected]
2005-01-20
[email protected]
2005-01-21
Capps, Scott
2005-01-25
Blunier, Stefan
Unstable Plasma - Dry Etching
Isaac Wing Tak Chan
2005-01-20
Hi Bill,

Here are some possible causes of unstable plasma:

1) pressure too low to sustain the plasma

2) RF matching network is not working properly

3) metal contamination or some metal pieces that causes the power and
ground electrodes to short. It looks like static discharge.

4) also, your power supply can be aging too.

Yours sincerely,

Isaac Chan
University of Waterloo

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