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MEMSnet Home: MEMS-Talk: Decontamination of KOH etched substrate
Decontamination of KOH etched substrate
2005-01-19
kailash
2005-01-19
Giancarlo Corti
2005-01-22
Paul Maciel
Decontamination of KOH etched substrate
Paul Maciel
2005-01-22
Hello Kailash,

Did you receive many replies to your inquiry? It seems most folks use a
variant of the RCA clean as we discussed.

Here is Stanford's  solution - see the web page


One from Japan -


One from North Carolina adapted from Stanford


Have a good weekend,
---Paul


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