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MEMSnet Home: MEMS-Talk: wet etchant etches Ti not Alumina?
wet etchant etches Ti not Alumina?
2005-01-25
Rihui He
2005-01-30
Aegis Liang
wet etchant etches Ti not Alumina?
Rihui He
2005-01-25
Hi all,

I'm looking for a wet etchant that etches Ti seed layer but not alumina. The
alumina was formed by anodization of Al. I have tried H2O:H2O2:HF=20:1:1 and
H2O2:HF=50:1. They etched away both Ti and alumina.

Thanks for your time
Rihui



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