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MEMSnet Home: MEMS-Talk: Silicon Oxynitride deposition using PECVD
Silicon Oxynitride deposition using PECVD
2005-01-25
Haroon Lais
2005-01-25
Eric Miller
2005-01-26
Feridun Ay
Silicon Oxynitride deposition using PECVD
Eric Miller
2005-01-25
Haroon,

Check out this link:

http://microfab.watechcenter.org/media/TechReport/Oxford%20Instruments%20Pla
smalab%20100%20Overview.pdf

Eric Miller
WTC Microfab Lab

reply
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