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MEMSnet Home: MEMS-Talk: Re: Etchant for AlAs in PHEMT
Re: Etchant for AlAs in PHEMT
2005-01-30
tks-c
Re: Etchant for AlAs in PHEMT
tks-c
2005-01-30
Hi All!
Can anybody help me in recipe for AlAs selective etchant for GaAs/AlAs/GaAs
structure. This alAs is stop layer in gate reccessing. I have tried to remove it
in HCl solution, but I am not sure that I have removed AlAs properly.
  Tanya Sakharova
reply
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