A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Sputtering Cr/Au condition
Sputtering Cr/Au condition
2005-01-31
Yuejun Zhao
Sputtering Cr/Au condition
Yuejun Zhao
2005-01-31
hello, everyone

I'm doing a project of sputtering Cr/Au layer. The Cr which is the adhension
layer is about 100A and the Au layer is about 1000A. The substrate is glass.

My question is what the temprature is when I sputter the Cr and Au. Should I use
annealing after sputtering?

thanks a lot


Zhao Yuejun
Graduate Student
University of Pittsburgh
Mechanical Engineering Dept
663 Benedum Hall
Pittsburgh, PA 15261
Ph: (412) 624-7823
e-mail: [email protected]
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Process Variations in Microsystems Manufacturing
The Branford Group
MEMS Technology Review