A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Polymer as a resist layer while etching silicon
Polymer as a resist layer while etching silicon
2005-02-02
dhanamjaya guda
2005-02-02
David Springer
Polymer as a resist layer while etching silicon
dhanamjaya guda
2005-02-02
Hi All,

        I would like to know whether i could use any polymer ( PMMA OR
PC) as a resist layer while doing isotropic etching of silicon. If not
could any one tell me how can i produce cylindrical posts with conical
head. I would really appreciate if any one could go a head and  reply
to this mail.

Thanks,
Dhanamjaya R Guda
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Harrick Plasma, Inc.
Addison Engineering
MEMStaff Inc.