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MEMSnet Home: MEMS-Talk: Metalic vs poly heaters
Metalic vs poly heaters
2005-02-03
Stephen Arnold
2005-02-03
Kirt Williams
2005-02-04
Michael D Martin
Metalic vs poly heaters
Kirt Williams
2005-02-03
Around 1989, Carlos Mastangelo made freestanding polysilicon heaters coated
with silicon nitride.
These were heated to at least a dim red hot (probably over 900 C), but I
don't know the temperature-lifetime characteristics.
Check on his disseration (U.C. Berkeley) and papers.

Yes, tungsten heaters need some type of protection to survive in air.
Platinum, being a noble metal, has been used for heaters in contact with air
without a coating.
NiCr and TaN are other candidates that may not need protection at 1100 C.

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