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MEMSnet Home: MEMS-Talk: Photoresist pattern on PDMS
Photoresist pattern on PDMS
2005-01-19
Miao LIU
2005-01-20
Hongjun-ECE
wafer bonding
2005-01-20
li cai
2005-01-21
Hongjun-ECE
2005-02-03
Miao LIU
Photoresist pattern on PDMS
Miao LIU
2005-02-03
Hello Hongjun,

  Thank you for your suggestion.
  The patten stay there will act like an electrode which can move together with
the PDMS
layer. the size is pretty large, which is around 100micros. But it is really
have to leave
the metal on PDMS which has deformation during the working time. That's where my
problem lies.

Best regards,

Miao LIU
[email protected]
2005-02-03


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