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MEMSnet Home: MEMS-Talk: 2mm high resistivity Si wafers
2mm high resistivity Si wafers
2005-02-04
Joolien Chee
2mm high resistivity Si wafers
Joolien Chee
2005-02-04
Hi all,

Have any fellow members know where to purchased thick (2mm) wafers high
resistivity Si wafer? These are my specs.

Thanks, Joolien

Details of specification

                Material                                :       HPS
                Orientation                     :       (1-0-0) +/- 1 Deg.
                Type                                    :       P/Bo
                Resistivity     ½ cm    :       > 8,000
                Diameter        mm                      :       100 +/- 0.20
                Flat, Primary   mm              :       SEMI standard
                Flat, Secondary mm              :       SEMI standard
                Thickness                               :       2mm
                Finish                          :       Two side polished
                Edge rounding                   :       Yes, standard
                TTV                                     :       < 3um

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