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MEMSnet Home: MEMS-Talk: glass frit for si si bonding
glass frit for si si bonding
2005-02-07
Annalisa Cerutti
glass frit for si si bonding
Annalisa Cerutti
2005-02-07
Hi,

I want to try glass frit silicon to silicon bonding.
Can anybody show me a tape or a spin on glass frit (not screen print glass
frit)for silicon bonding? I only found a tape from Vitta corporation, but I
have a problem because it has a working temperature of 552-600 degrees and I
can work only below 550 degrees in my wafer bonder machine.

Thanks in advance.
Best regards,

                Cerutti Annalisa
                CNR - IMM - Bologna (Italy)


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