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MEMSnet Home: MEMS-Talk: TMAH upward and downward Etch Rate
TMAH upward and downward Etch Rate
2005-02-08
Kevin Duan
TMAH upward and downward Etch Rate
Kevin Duan
2005-02-08
Hello everyone,

I found that the ER(etch rate) of TMAH varied a lot, not only related
to the concentration but also depends on how you put your wafer into
the solution.  In my experiment, I got much slower upward ER than
downward ER.  Is that right?

Duan

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