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MEMSnet Home: MEMS-Talk: Silicon/Pyrex Pattern Alignment! Need advices!
Silicon/Pyrex Pattern Alignment! Need advices!
2005-02-08
Badin Damrongsak
2005-02-09
shay kaplan
2005-02-09
Brubaker Chad
2005-02-09
Sarah Merrilees
Silicon/Pyrex Pattern Alignment! Need advices!
shay kaplan
2005-02-09
Badin,
You won't be able to do it in a double sided IR aligner (the glass is
opaque) but several companies have optical back side aligners - Suss, EV,
OSI

shay



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