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MEMSnet Home: MEMS-Talk: Copper in silicon
Copper in silicon
2005-02-09
HIDA Rachid
Copper in silicon
HIDA Rachid
2005-02-09
Hello I seek to deposit into localised by electrolyses 40 copper µm in
microstructures of 500 µm of width. The problem that we meet is that after
annealing (120°C) appears cracks in silicon. Already met this kind of
problem and so yes how to avoid that? Thank you If you have questions or
suggestions, you can contact me on my address e-mail: [email protected]


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