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MEMSnet Home: MEMS-Talk: wafer selection for mems
wafer selection for mems
2005-02-11
Ramesh Narayanan
2005-02-11
Pierre Huet
wafer selection for mems
Ramesh Narayanan
2005-02-11
Hi,
I am fabricating titanium coated cantilever beam. I am going use 100
Si wafer. Do i need to consider any other characteristics other than
crystal orientation for my project?
Thanks
ramesh

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