A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TEOS Paper
TEOS Paper
2005-02-14
Glenn Silveira
TEOS Paper
Glenn Silveira
2005-02-14
Hello all,

I am looking for a copy of the Barry Chin and Evert van der Ven paper on
PETEOS that was published in 1989

Thank you in advance,

Glenn Silveira
Process Development
Noel Technologies
(p)408 374-9549
(f)408 374-4127


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
University Wafer
Addison Engineering
Process Variations in Microsystems Manufacturing