I met a problem during anodic bonding of silicon-to-silicon wafer with 2um
thickness sputtered Pyrex glass film. The leakage current is high, around 3mA at
voltage 120V. Because of the high leakage current, the voltage applied on
silicon-to-silicon interface is only 60V (most of the voltage drops on over-
current protection resistor). Anyone has any idea what caused the leakage
current?

Thanks a lot for your answer