A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Sputtered NiV and Cu ething solution
About ITO
2005-02-15
Chandra S Tupelly
Sputtered NiV and Cu ething solution
2005-02-15
Masakazu Inagaki
Sputtered NiV and Cu ething solution
Masakazu Inagaki
2005-02-15
Good morning,

I am looking for etching solutions for NiV and Cu thin layers at once on
Al and SiO2 for use as a bump UBM. Would you inform me suitable
composition and operating conditions ?

Best regard,

Masakazu Inagaki


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Tanner EDA by Mentor Graphics
Nano-Master, Inc.
MEMS Technology Review