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MEMSnet Home: MEMS-Talk: Fw: Tungsten wet etching?
Fw: Tungsten wet etching?
2005-02-16
Tomi Meilahti
Fw: Tungsten wet etching?
Tomi Meilahti
2005-02-16

 Hi folks

 Does anyone have a good recipe for tungsten wet etching? What we are trying
 to do is etch through a 25um tungsten foil. At the moment we are using 30%
 H2O2 in 50C temperature and that does the job in about  two hours. The only
 problem is finding a suitable, patternable and preferably easily strippable
 masking material for this process. Any suggestions or ideas are highly
 appreciated.

 Tomi Meilahti [email protected]

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