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MEMSnet Home: MEMS-Talk: quartz surface rougness
quartz surface rougness
2005-02-17
guillaume dubois
quartz surface rougness
guillaume dubois
2005-02-17
Hello,

I am  a french student working on z-cut quartz etching.
I'd like to etch a 500µ (to have a 30µ structure) wafer but I can't
obtain a
good smoothness
(using 48% HF and 40% NH4F at 18°C).
I am looking for information about surfactants used in quartz etching or any
other idea.
have a nice day!
thx
dubois guillaume

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