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MEMSnet Home: MEMS-Talk: SU-8 2050 Cladding Material
SU-8 2050 Cladding Material
2005-02-18
Nan Xie
SU-8 2050 Cladding Material
Nan Xie
2005-02-18
Hi,

I've been working with SU-8 2050 (50um), can any of you suggest a good cladding
material for the following requirements:

1. planarizes SU-8
2. UV cured to 50um (same height as SU-8)
3. Lower index of refraction compared to SU-8. SU-8 n~1.59
4. Can be diced using a diamond saw.

Thanks alot!

Regards,

Nan Xie
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