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MEMSnet Home: MEMS-Talk: Recrystallization Temperature of Pt and Ti
Recrystallization Temperature of Pt and Ti
2005-02-18
Kamal Kishore
Recrystallization Temperature of Pt and Ti
Kamal Kishore
2005-02-18
Hi All

        Can anybody help in getting the temperature of recrystallization
of Platinum and Titanium?

Platinum Purity id 99.99% ( Deposited with E- Beam Evaporation)


and Ti tanium purity is 99.999% ( Deposited with both sputtering and
E-Beam Evaporation.)

Does the temp. of recrystallization depend upon the thuickness depsoted
and deposition techniques?

Thanks

     Kamal Kishore                     Phone :(0172) 2237401 to 10
     Engineer,VLSI:FAB                 Ext:576,550,570,441
     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
     Sector 72(Indl.Area),S A S Nagar,
     Mohali, Punjab- 160071





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