Hello Ali In a thin film fabrication process the more
energy you have the better is the adhesion and the
surface roughness. If we compare E beam and sputtering
the latter has more energy so sputtering gives better
surface roughness.

You can also achieve better roughness using ion
assisted process like ion assisted e beam and ion
assisted sputtering.

Hope this is help for you

Sarfaraz
Thin film centre
University of Paisley
UK





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